PURPOSE:To simplify the steps of manufacturing an electronic device by emitting a laser light via an optical mask and contracting and projecting a transparent pattern at the prescribed ratio, thereby eliminating a photolithography. CONSTITUTION:Single lateral mode Q switch pulse light of an Nd:YAG laser is condensed via a lens 2, and is emitted from the end via an optical fiber 3. The light is condensed via lens systems 4a-4c, the transparent pattern of an optical mask 6 is contracted to emit the light to a specimen 7, and the specimen 7 is annealed. A base 8 is synchronized with the Q switch of a laser oscillator 1, and the specimen is annealed by pulse while stepwisely feeding the base via a drive unit 9. According to this configuration, local heat treatment and chemical reaction treatment can be performed in two dimensions without photolithography.